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                    Hello, welcome to Rankuum Machinery Ltd English / Chinese
                    Product display
                    Series ZZS Box-type Vacuum Coating Machine
                    • Uses and features
                    • Specification parameter
                      Brief introduction
                       
                      After near 40 years of development, ZZS box-type vacuum coating machine by Rankuum Machinery has formed into a series with size of the vacuum coating chamber varying from 500mm to 3,600mm, and presently, an ideal series for coating of multi-layer optical and electrical thin-films that is widely used in scientific research or mass production by enterprises, research institutions, colleges and tertiary institutions.
                       
                      Product features
                       
                      This product has a box-type structure and rear-mounted vacuum system for convenience of operation and maintenance as well as a flattened surface for convenience of cleaning, thus especially suitable for installation in the wall of a clean room.

                      The vacuum system is characterized as high in pumping speed and vacuum degree and short in pumping time and production period.

                      A tubular heating element is employed for equal baking, an element with a long service time capable to render a maximum temperature of 350℃ and a homogeneity of 270℃±10℃.

                      Workpiece rotation, driven by the upper center and provided with water-cooling for the bearing strip and sealing with magnetic fluid, is smooth and reliable.

                      A controller on depth of quartz crystal films is employed to realize automatic control throughout the coating procedure.

                      The advanced coating control system with a nice and practical human-machine interface is stable and reliable, allowing manual, semi-automatic and full automatic operation.
                       

                      Scope of application
                       
                      This machine is applicable to production of IR-CUT filter plate, color separation filter, high-reflection film, AR film, long-wave pass, short-wave pass and various kinds of electrical film.
                       
                      Standard configurations for common use
                       
                      Specified in the following table are configurations and indices of our five standard models commonly used. Over years, our company has developed series of box-type vacuum coating machine sized at  350mm, 450mm,500mm, 550mm, 630mm, 700mm, 800mm, 900mm, 1100mm, 1,250mm, 1,300mm, 1,500mm, 1,800mm, 2,200mm and 2,500mm, 3,600mm. Furthermore, our company can, upon request of vast customers, provide customized manufacturing of vacuum coating machine of various forms, including special customization of vacuum chamber size, vacuum system configuration, work holder system, workpiece baking system, monitoring system on film depth, evaporation system, inflation system, ion source system and electrical control system.
                      ZZS系列箱式真空鍍膜機
                      Series ZZS Box-type Vacuum Coating Machine
                       
                      常用標準配置表
                      Standard configurations for common use
                      型  號
                      Model
                      ZZS600 ZZS700 ZZS800 ZZS900 ZZS1100 ZZS1300 ZZS1800
                      真空室尺寸(直徑×高)
                      Size of the vacuum chamber (diameter× height)
                      Φ600×750 Φ710×850 Φ800×900 Φ900×1000 Φ1100×1300 Φ1300×1300 Φ1800×2000
                      極限真空度
                      Ultimate vacuum degree
                      ≤3.0×10-4Pa
                      恢復真空時間
                      Time for vacuum recovery
                      4.0×10-3Pa≤15min
                      抽氣系統
                      Pumping system
                      擴散泵 Diffusion pump K-400 TK-500 K-600 K-630 TK-500×2 K-630×2 K-800×2
                      羅茨泵 Roots pump       ZJP-150 ZJP-300 ZJP-300 ZJP-1200
                      機械泵 Mechanical pump 2X-30 2X-70 2X-70 2X-70 2X-70 2X-70 2X-70,H-150×2
                      真空測量系統
                      Vacuum measuring system
                      配三路數字復合真空計,兩路低真空,一路高真空
                      Three-way digital compound vacuum gauge, two ways of low vacuum and one of high vacuum
                      操作方式
                      Operation mode
                      手動/自動
                      Manual/automatic
                      工件夾具
                      Work piece holder
                      Φ600 Φ640 Φ750 Φ840 Φ1040 Φ1240 Φ1720
                      工件烘烤系統
                      Work piece baking system
                      上烘烤,鎧裝管狀加熱器加熱,******溫度350℃,PID自動控溫及顯示
                      Up baking; heated by sheathed tubular heating element; maximum temperature 350℃; PID automatic temperature control and display.
                      蒸發源
                      Evaporation source
                       
                      電阻蒸發源
                      Resistance evaporation source
                      電阻蒸發源功率4KW(8V、600A)
                      Power of the resistance evaporation source: 4KW (8V, 600A)
                      電子束蒸發源
                      Electron beam evaporation source
                       
                      E型電子束蒸發源,功率6~10KW
                      Power of E-type electron beam evaporation source: 6-10KW
                      膜厚監控系統
                      Monitoring system on depth of films
                      光學膜厚監控,波長范圍380-800nm,9透反射光路,六位電動比較片帶顯示;石英晶體膜厚監控,美國SQC-310、IC/6
                      The optical film thickness monitor, a wavelength range of 380-800nm, 9transflective optical path, six electric comparison sheet with display; quartz crystal thickness monitoring, the United States SQC-310, IC / 6
                      充氣系統 charge systems 自動壓強儀2~510-2Pa
                      Automatic pressure instrument
                      質量流量計:單路單顯,雙路雙顯
                      Mass flow meter: one way one display, dual way dual display
                      離子輔助(選配)
                      Ion-assisted (optional)
                      H6霍爾離子源、H10霍爾離子源、Φ12cm考夫曼離子源、Φ16cm考夫曼離子源
                      H6 Hall ion source, H10 Hall ion source, Φ12cm Kaufman ion source, Φ16cm Kaufman ion source
                      深冷捕集器(選配)
                      Cryogenic trap (optional)
                      國產12P、國產15P、進口POLYCOLD550、進口POLYCOLD670
                      Domestic 12P, 15P, POLYCOLD 550, POLYCOLD 670
                       
                      動力需求
                      Power demand
                      冷卻水
                      Cooling water
                      壓力溫度
                      Pressure and temperature
                      壓力:0.25~0.35MPa;溫度≤25℃
                      Pressure: 0.25-0.35MPa; temperature ≤25℃
                      流量
                      Flow rate
                      ≥50L/min ≥60L/min ≥80L/min ≥100L/min ≥140L/min ≥160L/min ≥180L/min
                      壓縮空氣
                      Compressed air
                      壓力:0.5~0.7MPa
                      Pressure: 0.5-0.7MPa
                      ******消耗電力
                      Maximum power consumption
                      ~25KW ~35KW ~40KW ~45KW ~50KW ~60KW ~120KW
                      設備外形尺寸(寬×深×高)
                      Overall dimension (width×depth×height)
                      2100×1800×2000 3350×2600×2370 3580×3000×2450 3870×3600×2670 3870×3600×2670 3900×4050×2950 4400×4000×3600
                      設備總重(KG)
                      Gross weight (Kg)
                       
                      約1500
                      About 1,500
                      約2000
                      About 2,000
                      約2500
                      About 2,500
                      約3000
                      About 3,000
                      約3000
                      About 3,000
                      約4000
                      About 4,000
                      約6000
                      About 4,000
                       
                       
                       

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