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                    Model F Vertical Turbomolecular Pump
                    • Uses and features
                    • Specification parameter
                      Product Applications
                       
                      The turbomolecular pump is used for the application of high and ultra-high vacuum.
                      It can not be used for direct deflation to atmosphere and needs to be equipped with backing pump
                       
                      Main applications:
                       
                      ●Surface physics and analytical instrument
                      ●Plasma physics and space research
                      ●Nuclear fusion utilities
                      ●Atomic&molecullar beam system.particle accelerator
                      ●Vacuum coating
                      ●Vacuum smelting
                      ●Semiconductor and  optical industry

                      Product Features
                       
                      ●Compact,easy to install and use
                      ●Low vibration and noise.perfect rotary balance
                      ●Constant rotating speed in the rang of 10-1~10-8pa
                      ●Ceramic bearing with long servlce life
                      F型渦輪分子泵
                      Model F Vertical  Turbomolecular  Pump
                      技術參數Technical specifications:
                      型號 
                      Model
                      FC-150/450 FG-150/450 FC-250/1400 FG-250/1400 F-400B/3500
                      進氣口法蘭 
                      Inlet flange  (mm)
                      DN160CF DN160LF DN250CF DN250LF DN400LF
                      出氣口法蘭 
                      Oulet flange  (mm)
                      DN40KF DN63LF DN100LF
                      抽氣速度  
                      Pumping speed  (L/S)
                      450 1400 3500
                      極限壓力
                      Ultimate pressure
                      不烘烤
                      Without baking  (Pa)
                      6×10-6 6×10-6 6×10-6
                      壓縮比
                      Compression ratio
                      對N2 108 108 108
                      對H2 102 102 102
                      轉速RPM   (r/min) 24000 24000 14100
                      起動時間  
                      Start-up time <(Min)
                      5 10 20
                      前級壓力  
                      Fore pressure <(Pa)
                      10 10 10
                      建議采用的前級泵
                      Recommended backing pump  (L/s)
                      8 15 30
                      冷卻水溫度
                      Cooling water temperature <(℃)
                      ≤25 ≤25 ≤25
                      冷卻水壓力
                      Cooling water pressure (Mpa)
                      0.196 0.196 0.196
                      泵體烘烤溫度
                      Temperature of baking <(℃)
                      120 120 120
                      重量  
                      Weight(Kg)
                      35 70 125
                       

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